3 citations · 3 across the 2 of their papers we have counts for
2 papers
cs.OH2008★ 3 cited
Micromachined Polycrystalline Sige-Based Thermopiles for Micropower Generation on Human Body
Z. Wang, V. Leonov, P. Fiorini +1
This paper presents a polycrystalline silicon germanium (poly-SiGe) thermopile specially designed for thermoelectric generators used on human body. Both the design of the single th…
cs.OH2007
A Generic Surface Micromachining Module for Mems Hermetic Packaging at Temperatures Below 200 degrees C
R. Hellin-Rico, J. -P. Celis, K. Baert +2
This paper presents the different processing steps of a new generic surface micromachining module for MEMS hermetic packaging at temperatures around 180 degrees C based on nickel p…