15 citations · 42 across the 7 of their papers we have counts for
4 papers · 1 filter
A Novel Piezoelectric Microtransformer for Autonmous Sensors Applications
Patrick Sangouard, G. Lissorgues, T. Bourouina
This work relates to a novel piezoelectric transformer to be used in an autonomous sensor unit, possibly in conjunction with a RF-MEMS retro-modulator.
A High Power Density Electrostatic Vibration-to-Electric Energy Converter Based On An In-Plane Overlap Plate (IPOP) Mechanism
A. M. Paracha, Ph. Basset, F. Marty +3
In this paper, design, fabrication and characterization issues of a bulk silicon-based, vibration powered, electric energy generator are addressed. The converter is based on an In-…
Electrostatically-Driven Resonator on Soi with Improved Temperature Stability
A. Giridhar, F. Verjus, F. Marty +2
This paper deals with a single-crystal-silicon (SCS) MEMS resonator with improved temperature stability. While simulations have shown that the temperature coefficient of resonant f…
Surface Conditioning Effect on Vacuum Microelectronics Components Fabricated by Deep Reactive Ion Etching
A. Phommahaxay, G. Lissorgues, L. Rousseau +2
Advances in material processing such as silicon micromachining are opening the way to vacuum microelectronics. Two-dimensional vacuum components can be fabricated using the microsy…