15 citations · 27 across the 3 of their papers we have counts for
3 papers
physics.ins-det2018★ 15 cited
Sensitivity optimization of micro-machined thermo-resistive flow-rate sensors on silicon substrates
Shaun Ferdous, Sreyash Sarkar, Frederic Marty +4
We report on an optimized micro-machined thermal flow-rate sensor as part of an autonomous multi-parameter sensing device for water network monitoring. The sensor has been optimize…
cs.OH2008★ 6 cited
A High Power Density Electrostatic Vibration-to-Electric Energy Converter Based On An In-Plane Overlap Plate (IPOP) Mechanism
A. M. Paracha, Ph. Basset, F. Marty +3
In this paper, design, fabrication and characterization issues of a bulk silicon-based, vibration powered, electric energy generator are addressed. The converter is based on an In-…
cs.OH2007★ 6 cited
An Active Chaotic Micromixer Integrating Thermal Actuation Associating PDMS and Silicon Microtechnology
O. Français, M. -C. Jullien, L. Rousseau +5
Due to scaling laws, in microfluidic, flows are laminar. Consequently, mixing between two liquids is mainly obtained by natural diffusion which may take a long time or equivalently…