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cs.OH2008
A Nanostructual Microwave Probe Used for Atomic Force Microscope
Y. Ju, M. Hamada, T. Kobayashi +1
In order to develop a new structure microwave probe, the fabrication of AFM probe on the GaAs wafer was studied. A waveguide was introduced by evaporating Au film on the top and bo…
cs.OH2008★ 4 cited
Development of a Nanostructual Microwave Probe Based on GaAs
Y. Ju, T. Kobayashi, H. Soyama
With the development of nanotechnology, the measurement of electrical properties in local area of materials and devices has become a great need. Although a lot kind of scanning pro…