1 citations · 1 across the 2 of their papers we have counts for
2 papers
cs.OH2008★ 1 cited
0-level Vacuum Packaging RT Process for MEMS Resonators
N. Abelé, D. Grogg, C. Hibert +3
A new Room Temperature (RT) 0-level vacuum package is demonstrated in this work, using amorphous silicon (aSi) as sacrificial layer and SiO2 as structural layer. The process is com…
cs.OH2008
Silicon on Nothing Mems Electromechanical Resonator
C. Durand, F. Casset, P. Ancey +7
The very significant growth of the wireless communication industry has spawned tremendous interest in the development of high performances radio frequencies (RF) components. Micro…