2 citations · 2 across the 2 of their papers we have counts for
3 papers
Package Hermeticity Testing with Thermal Transient Measurements
Andras Vass-Varnai, M. Rencz
The rapid incursion of new technologies such as MEMS and smart sensor device manufacturing requires new tailor-made packaging designs. In many applications these devices are expose…
Porous Alumina Based Capacitive MEMS RH Sensor
L. Juhasz, A. Vass-Varnai, Veronika Timar-Horvath +2
The aim of a joint research and development project at the BME and HWU is to produce a cheap, reliable, low-power and CMOS-MEMS process compatible capacitive type relative humidity…
Usage of Porous Al2O3 Layers for RH Sensing
Veronika Timár-Horváth, László Juhász, András Vass-Várnai +1
At the Department of Electron Devices a cheap, more or less CMOS process compatible capacitive type RH sensor has been developed. Capacitive sensors are based on dielectric propert…