2 citations · 2 across the 2 of their papers we have counts for
Showing cs.OHShow all
2 papers · 1 filter
cs.OH2008★ 2 cited
Porous Alumina Based Capacitive MEMS RH Sensor
L. Juhasz, A. Vass-Varnai, Veronika Timar-Horvath +2
The aim of a joint research and development project at the BME and HWU is to produce a cheap, reliable, low-power and CMOS-MEMS process compatible capacitive type relative humidity…
cs.OH2008
Usage of Porous Al2O3 Layers for RH Sensing
Veronika Timár-Horváth, László Juhász, András Vass-Várnai +1
At the Department of Electron Devices a cheap, more or less CMOS process compatible capacitive type RH sensor has been developed. Capacitive sensors are based on dielectric propert…