A Novel X-Axis Tuning Fork Gyroscope with "8 Vertical Springs-Proofmass" Structure on (111)-Silicon

Fei Duan, Jiwei Jiao, Yucai Wang +5

A novel x-axis tuning fork MEMS gyroscope with "8 vertical springs-proofmass" structure for Coriolis effect detection is presented. Compared with the common single-plane springs, t…