Thermal stability and phase transformation of $\hat{I}\pm$-, $\hat{I}º(\hat{I}\mu )$-, and ${\hat{I}}^3$-Ga${}_2$O${}_3$ thin films to ${\hat{I}}^2$-Ga${}_2$O${}_3$ under various ambient conditions

J. Tang, K. Jiang, P. Tseng +3

Phase transitions in metastable $\hat{I}\pm$-, $\hat{I}º(\hat{I}\mu )$-, and ${\hat{I}}^3$-Ga${}_2$O${}_3$ films to thermodynamically stable ${\hat{I}}^2$-Ga${}_2$O${}_3$ during annealing in air, N${}_2$, and vacuum have been syste…