5 papers
Epitaxial α-Ta (110) film on a-plane sapphire substrate for superconducting qubits on wafer scale
Boyi Zhou, Lina Yang, Tao Wang +3
Realization of practical superconducting quantum computing requires many qubits of long coherence time. Compared to the commonly used Ta deposited on c-plane sapphire, which occasi…
Investigation of the deposition of -tantalum (110) films on a-plane sapphire substrate by molecular beam epitaxy for superconducting circuit
Haolin Jia, Boyi Zhou, Tao Wang +6
Polycrystalline α-tantalum (110) films deposited on c-plane sapphire substrate by sputtering are used in superconducting qubits nowadays. However, these films always occasionally…
Stable and low loss oxide layer on α-Ta (110) film for superconducting qubits
Zengqian Ding, Boyi zhou, Tao Wang +5
The presence of amorphous oxide layers can significantly affect the coherent time of superconducting qubits due to their high dielectric loss. Typically, the surface oxides of supe…
High-quality superconducting α-Ta film sputtered on heated silicon substrate
Yanfu Wu, Zengqian Ding, Kanglin Xiong +1
Intrigued by the discovery of the long lifetime in the α-Ta/Al2O3-based Transmon qubit, researchers recently found α-Ta film is a promising platform for fabricating multi-qubits…
Fabrication of Al/AlOx/Al junctions with high uniformity and stability on sapphire substrates
Yuzhen Zheng, Shuming Li, Zengqian Ding +3
Tantalum and aluminum on sapphire are widely used platforms for qubits of long coherent time. As quantum chips scale up, the number of Josephson junctions on Sapphire increases. Th…