collaborators

1 paper

eess.SY2024

Study on layout of double rotated serpentine springs for vertical-comb-driven torsional micromirror

Biyun Ling, Yuhu Xia, Minli Cai +2

The combination of double rotated serpentine springs (RSS) and vertical comb-drive is a suitbale solution for the development of torsional micromirror with high fill factor, low fa…