Fabrication of submicron La${}_{2-x}$Sr${}_x$CuO${}_4$ intrinsic Josephson junction stacks

Yuimaru Kubo, Yamaguchi Takahide, Takayoshi Tanaka +6

Intrinsic Josephson junction (IJJ) stacks of cuprate superconductors have potential to be implemented as intrinsic phase qubits working at relatively high temperatures. We report s…