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physics.plasm-ph2024

Effect of gas pressure on plasma asymmetry and higher harmonics generation in sawtooth waveform driven capacitively coupled plasma discharge

Sarveshwar Sharma, Miles Turner, Nishant Sirse

Using particle-in-cell (PIC) simulation technique, the effect of gas pressure (5-500 mTorr) on the plasma spatial asymmetry, ionization rate, metastable gas densities profile, elec…