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20242026
most citedAstro-NER -- Astronomy Named Entity Recognition: Is GPT a Good Domain Expert Annotator?

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cs.AI2026

Mined from Scientific Literature: Process Schemas for Atomic Layer Deposition and Etching in Materials Science

Sameer Sadruddin, Eleni Poupaki, Alex Watkins +5

Atomic layer deposition (ALD) and atomic layer etching (ALE) are reported heterogeneously across experimental and simulation literature in materials science, hindering comparison a…