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physics.comp-ph2006
Factors Affecting the Precision of Electrostatic Computation of 3D MEMS Structures
N. Majumdar, S. Mukhopadhyay
Micro-Electro-Mechanical Systems (MEMS) normally have fixed or moving structures (plates or array of thin beams) with cross-sections of the order of microns and lengths of the orde…
physics.comp-ph2006
Use of the neBEM solver to Compute the 3D Electrostatic Properties of Comb Drives
S. Mukhopadhyay, N. Majumdar
Micro-Electro-Mechanical Systems (MEMS) comb drives are used for both as sensors and actuators. As a result, they have been considered to be very important in MEMS technology and h…