Minimizing Kinetic Inductance in Tantalum-Based Superconducting Coplanar Waveguide Resonators for Alleviating Frequency Fluctuation Issues

Dengfeng Li, Jingjing Hu, Yuan Li +1

Advancements in the fabrication of superconducting quantum devices have highlighted tantalum as a promising material, owing to its low surface oxidation microwave loss at low tempe…