Nanosecond Laser Annealing: impact on superconducting Silicon on Insulator epilayers

Y. Baron, J. L. Lábár, S. Lequien +8

We present superconducting monocrystalline Silicon On Insulator thin 33 nm epilayers. They are obtained by nanosecond laser annealing under ultra-high vacuum on 300 mm wafers heavi…