4 papers
Deposition Rates in Thermal Laser Epitaxy: Simulation and Experiment
Thomas J. Smart, Bilen Emek Abali, Hans Boschker +1
The modeling of deposition rates in Thermal Laser Epitaxy (TLE) is essential for the accurate prediction of the evaporation process and for improved dynamic process control. We dem…
Adsorption-controlled Growth of Homoepitaxial c-plane Sapphire Films
Lena N. Majer, Tolga Acartürk, Peter A. van Aken +13
Sapphire is a technologically highly relevant material, but it poses many challenges to performing epitaxial thin-film deposition. We have identified and applied the conditions for…
alpha-Ta Films on c-plane Sapphire with Enhanced Microstructure
Lena N. Majer, Sander Smink, Wolfgang Braun +7
Superconducting films of alpha-Ta are promising candidates for the fabrication of advanced superconducting qubits. However, alpha-Ta films suffer from many growth-induced structura…
Adsorption-controlled epitaxy of perovskites
Wolfgang Braun
I propose to use laser heating both for the substrate and the thermal evaporation sources in a vacuum chamber operating at pressures from XHV to values where the mean free path of…