2 papers
cs.CE2025
Deposition Rates in Thermal Laser Epitaxy: Simulation and Experiment
Thomas J. Smart, Bilen Emek Abali, Hans Boschker +1
The modeling of deposition rates in Thermal Laser Epitaxy (TLE) is essential for the accurate prediction of the evaporation process and for improved dynamic process control. We dem…
cond-mat.mtrl-sci2024
Adsorption-controlled epitaxy of perovskites
Wolfgang Braun
I propose to use laser heating both for the substrate and the thermal evaporation sources in a vacuum chamber operating at pressures from XHV to values where the mean free path of…