Positive-tone Nanolithography of Antimony Trisulfide with Femtosecond Laser Wet-etching

Abhrodeep Dey, Uwe Hübner, Albane Benardais +10

Antimony trisulfide ($S{b}_2{S}_3$), as an emerging material for integrated photonic devices, has attracted significant attention due to its high index, low loss, and phase-changin…