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20082022
most citedMeasurement of the Casimir force between a gold sphere and silicon surface with nanoscale trench arrays

239 citations · 494 across the 9 of their papers we have counts for

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Showing 2014Show all

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cond-mat.mes-hall2014

Integrated silicon optomechanical transducers and their application in atomic force microscopy

Jie Zou, Marcelo Davanco, Yuxiang Liu +3

This chapter describes the basic design, simulation, and fabrication for fully Si integrated, waveguide coupled, optomechanical force and displacement sensors. The approach of full…