17 citations · 41 across the 3 of their papers we have counts for
3 papers
Anomalous thermal oxidation of gadolinium thin films deposited on silicon by high pressure sputtering
María Ángela Pampillón, Pedro Carlos Feijoo, Enrique San Andrés +2
Thin gadolinium metallic layers were deposited by high-pressure sputtering in pure Ar atmosphere. Subsequently, in situ thermal oxidation was performed at temperatures ranging from…
Time-Dependent Dielectric Breakdown on Subnanometer EOT nMOS FinFETs
Pedro C. Feijoo, Thomas Kauerauf, María Toledano-Luque +3
In this paper, the time-dependent dielectric breakdown (TDDB) in sub-1-nm equivalent oxide thickness (EOT) n-type bulk FinFETs is studied. The gate stacks consist of an IMEC clean…
Towards metal electrode interface scavenging of rare-earth scandates: A Sc2O3 and Gd2O3 study
María Ángela Pampillón, Pedro Carlos Feijoo, Enrique San Andrés +4
AmorphousGd2O3 and Sc2O3 thin films were deposited on Si by high-pressure sputtering (HPS). In order to reduce the uncontrolled interfacial SiOx growth, firstly a metallic film of…