Investigation of Ga interstitial and vacancy diffusion in $\beta$-Ga${}_2$O${}_3$ via split defects: a direct approach via master diffusion equations

Channyung Lee, Michael A. Scarpulla, Elif Ertekin

The low symmetry of monoclinic $\beta$-Ga${}_2$O${}_3$ leads to elaborate intrinsic defects, such as Ga vacancies split amongst multiple lattice sites. These defects contribute to fast, an…