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cs.AI2026
ResilPhase: Plug-and-Play Phase Mapping and Noise-Resilient Macro-Trajectory Extrapolation for Diffusion Acceleration
Qicheng Zhao, Yu Li, Qi Sun +1
The adoption of powerful diffusion models is hindered by their significant inference latency. Recent ``cache-then-forecast'' schemes alleviate this issue by accelerating DiTs using…
cs.AI2026
LithoDreamer: A Physics-Informed World Model for Multi-Stage Computational Lithography
Yuqi Jiang, Yumeng Liu, Zimu Li +7
As semiconductor technology nodes scale, computational lithography is essential for ensuring yield and performance. However, lithography is a continuous physical process involving…