3 papers
cs.AI2026
LithoDreamer: A Physics-Informed World Model for Multi-Stage Computational Lithography
Yuqi Jiang, Yumeng Liu, Zimu Li +7
As semiconductor technology nodes scale, computational lithography is essential for ensuring yield and performance. However, lithography is a continuous physical process involving…
cs.LG2025
Unitho: A Unified Multi-Task Framework for Computational Lithography
Qian Jin, Yumeng Liu, Yuqi Jiang +2
Reliable, generalizable data foundations are critical for enabling large-scale models in computational lithography. However, essential tasks-mask generation, rule violation detecti…
cs.CV2025
SEM-CLIP: Precise Few-Shot Learning for Nanoscale Defect Detection in Scanning Electron Microscope Image
Qian Jin, Yuqi Jiang, Xudong Lu +5
In the field of integrated circuit manufacturing, the detection and classification of nanoscale wafer defects are critical for subsequent root cause analysis and yield enhancement.…