3 papers
cs.AI2024
Differentiable Edge-based OPC
Guojin Chen, Haoyu Yang, Haoxing Ren +2
Optical proximity correction (OPC) is crucial for pushing the boundaries of semiconductor manufacturing and enabling the continued scaling of integrated circuits. While pixel-based…
cs.AI2024
Intelligent OPC Engineer Assistant for Semiconductor Manufacturing
Guojin Chen, Haoyu Yang, Bei Yu +1
Advancements in chip design and manufacturing have enabled the processing of complex tasks such as deep learning and natural language processing, paving the way for the development…
cs.CV2024
CAMO: Correlation-Aware Mask Optimization with Modulated Reinforcement Learning
Xiaoxiao Liang, Haoyu Yang, Kang Liu +2
Optical proximity correction (OPC) is a vital step to ensure printability in modern VLSI manufacturing. Various OPC approaches based on machine learning have been proposed to pursu…