most citedDevelopment of a Classical Force Field for the Oxidised Si Surface: Application to Hydrophilic Wafer Bonding

86 citations · 96 across the 2 of their papers we have counts for

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cond-mat.mtrl-sci2008★ 10 cited

Stress Development and Impurity Segregation during Oxidation of the Si(100) Surface

Daniel J. Cole, Mike C. Payne, Lucio Colombi Ciacchi

We have studied the segregation of P and B impurities during oxidation of the Si(100) surface by means of combined static and dynamical first-principles simulations based on densit…

cond-mat.mtrl-sci2008★ 86 cited

Development of a Classical Force Field for the Oxidised Si Surface: Application to Hydrophilic Wafer Bonding

Daniel J. Cole, Mike C. Payne, Gabor Csanyi +2

We have developed a classical two- and three-body interaction potential to simulate the hydroxylated, natively oxidised Si surface in contact with water solutions, based on the com…