Microscopic Insights into Fatigue Mechanism in Wurtzite Ferroelectric Al${}_{0.65}$Sc${}_{0.35}$N: Oxygen Infiltration Enabled Grain Amorphization Spanning Boundary to Bulk

Ruiqing Wang, Danyang Yao, Jiuren Zhou +10

For the first time, the fatigue behavior involving external oxygen in highly Sc-doped AlN ferroelectric film was observed using transmission electron microscope techniques. Despite…