2 papers
physics.app-ph2024
Piezoresistive PtSe pressure sensors with reliable high sensitivity and their integration into CMOS ASIC substrates
Sebastian Lukas, Nico Rademacher, SofÃa Cruces +14
Membrane-based sensors are an important market for microelectromechanical systems (MEMS). Two-dimensional (2D) materials, with their low mass, are excellent candidates for suspende…
physics.app-ph2024
High-yield large-scale suspended graphene membranes over closed cavities for sensor applications
Sebastian Lukas, Ardeshir Esteki, Nico Rademacher +10
Suspended membranes of monoatomic graphene exhibit great potential for applications in electronic and nanoelectromechanical devices. In this work, a "hot and dry" transfer process…