Enhancement of hole mobility in high-rate reactively sputtered Cu2O thin films induced by laser thermal annealing

Jiri Rezek, Martin Kucera, Tomas Kozak +3

In presented work, a reactive high-power impulse magnetron sputtering (r-HiPIMS) was used for high-rate deposition ( 170 nm/min) of Cu2O films. Films were deposited on a standard s…