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20232025
most citedUltra-high-speed high-resolution laser lithography for lithium niobate integrated photonics

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physics.optics2024

Compact low-half-wave-voltage thin film lithium niobate electro-optic phase modulator fabricated by photolithography assisted chemo-mechanical etching

Lang Gao, Youting Liang, Jinming Chen +7

This paper presents a compact dual-arm thin film lithium niobate (TFLN) electro-optic phase modulator fabricated using the photolithography-assisted chemo-mechanical etching (PLACE…