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Thibault Lechien

1 paper here

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fields
  • cs.CV1
ORCID 0000-0001-6284-2842

identity via Semantic Scholar / OpenAlex

most citedAutomated Semiconductor Defect Inspection in Scanning Electron Microscope Images: a Systematic Review

4 citations · 4 across the 1 of their papers we have counts for

collaborators

1 paper

cs.CV2023★ 4 cited

Automated Semiconductor Defect Inspection in Scanning Electron Microscope Images: a Systematic Review

Thibault Lechien, Enrique Dehaerne, Bappaditya Dey +4

A growing need exists for efficient and accurate methods for detecting defects in semiconductor materials and devices. These defects can have a detrimental impact on the efficiency…

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Not affiliated with arXiv. Researcher data from Semantic Scholar (ODC-BY) and OpenAlex.