most citedImpact of plasma potential and plasma sheath composition on the InN PAMOCVD growth kinetics and structural properties

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physics.plasm-ph2023★ 1 cited

Impact of plasma potential and plasma sheath composition on the InN PAMOCVD growth kinetics and structural properties

Zaheer Ahmad, Alexander Kozhanov

In this paper, we present the effect of various growth parameters of PA-MOCVD on the plasma potential. The impact of varying plasma potential on the growth and structural propertie…