Formation of hydrogen impurity states in silicon and insulators at low implantation energies

T. Prokscha, E. Morenzoni, D. G. Eshchenko +5

The formation of hydrogen-like muonium (Mu) has been studied as a function of implantation energy in intrinsic Si, thin films of condensed van der Waals gases (N2, Ne, Ar, Xe), fus…