5 papers · 1 filter
Pressure dependence of magnetron sputtering: 2D-RZ particle-in-cell and 1D fluid modeling
Joseph G. Theis, Gregory R. Werner, Thomas G. Jenkins +2
We reproduce the consistently-seen experimental voltage versus pressure (V-p) dependence of DC magnetron sputtering (DCMS) with 2D-RZ particle-in-cell (PIC) simulation. Informed by…
Grid instability growth rates for explicit, electrostatic momentum- and energy-conserving particle-in-cell algorithms
Luke C Adams, Gregory R Werner, John R Cary
When the Debye length is not resolved in a simulation using the most common particle-in-cell (PIC) algorithm, the plasma will unphysically heat until the Debye length becomes resol…
Modeling the Role of Secondary Electron Emission in Direct Current Magnetron Sputtering using Explicit Energy-Conserving Particle-in-Cell Methods
Daniel Main, Thomas G. Jenkins, Joseph G. Theis +5
We present results from a fully kinetic particle-in-cell (PIC) simulation of direct current magnetron sputtering (dcMS) in a 2D cylindrically symmetric geometry. The particle-in-ce…
Suppressing grid instability and noise in particle-in-cell simulation by smoothing
Gregory R. Werner, Luke C. Adams, John R. Cary
Smoothing short-wavelength charge density variations can stabilize explicit electrostatic particle-in-cell (PIC) plasma simulations against grid heating and cold beam instabilities…
Empirically extending 1D Child-Langmuir theory to a finite temperature beam
Jesse M. Snelling, Gregory R. Werner, John R. Cary
Numerical solutions to the 1D steady-state Vlasov-Poisson system are used to develop a straightforward empirical formula for the electric current density transmitted through a vacu…