3 papers
physics.app-ph2026
Improving the lifetime of aluminum-based superconducting qubits through atomic layer etching and deposition
Neha Mahuli, Joaquin Minguzzi, Jiansong Gao +9
We present a dry surface treatment combining atomic layer etching and deposition (ALE and ALD) to mitigate dielectric loss in fully fabricated superconducting quantum devices forme…
quant-ph2025
Broadband and high-precision two-level system loss measurement using superconducting multi-wave resonators
Cliff Chen, Shahriar Aghaeimeibodi, Yuki Sato +3
Two-level systems (TLS) are known to be a dominant source of dissipation and decoherence in superconducting qubits. Superconducting resonators provide a convenient way to study TLS…
physics.app-ph2025
Low-Loss Superconducting Resonators Fabricated from Tantalum Films Grown at Room Temperature
Guillaume Marcaud, David Perello, Cliff Chen +16
The use of -tantalum in superconducting circuits has enabled a considerable improvement of the coherence time of transmon qubits. The standard approach to grow -tantalum th…