most citedDirect measurements of the energy flux due to chemical reactions at the surface of a silicon sample interacting with a SF6 plasma

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physics.plasm-ph2008★ 22 cited

Direct measurements of the energy flux due to chemical reactions at the surface of a silicon sample interacting with a SF6 plasma

Remi Dussart, Anne-Lise Thomann, Laurianne E. Pichon +5

Energy exchanges due to chemical reactions between a silicon surface and a SF6 plasma were directly measured using a heat flux microsensor (HFM). The energy flux evolution was comp…