22 citations · 22 across the 3 of their papers we have counts for
3 papers
The role of sputtered atom and ion energy distribution in films deposited by Physical Vapor Deposition: A molecular dynamics approach
Soumya Atmane, Maroussiak Alexandre, Amaël Caillard +4
We present a comparative study of copper film growth with a constant energy neutral beam, thermal evaporation, dc magnetron sputtering, high-power impulse magnetron sputtering (HiP…
Influence of Defects on Barrier Energy Formation for OOH* Intermediate in ORR on Tetragonal-ZrO 2 with Adsorbed-Hydroxyl
Seyedehsara Fazeli, Pascal Brault, Amaël Caillard +4
Accelerating the oxygen reduction reaction (ORR) is a main subject of electrocatalysis research.A critical step of ORR is the formation of the hydroperoxyl functional group (OOH*)…
Direct measurements of the energy flux due to chemical reactions at the surface of a silicon sample interacting with a SF6 plasma
Remi Dussart, Anne-Lise Thomann, Laurianne E. Pichon +5
Energy exchanges due to chemical reactions between a silicon surface and a SF6 plasma were directly measured using a heat flux microsensor (HFM). The energy flux evolution was comp…