134 citations · 136 across the 2 of their papers we have counts for
2 papers
physics.optics2024★ 134 cited
Non-Destructive, High-Resolution, Chemically Specific, 3D Nanostructure Characterization using Phase-Sensitive EUV Imaging Reflectometry
Michael Tanksalvala, Christina L. Porter, Yuka Esashi +22
Next-generation nano and quantum devices have increasingly complex 3D structure. As the dimensions of these devices shrink to the nanoscale, their performance is often governed by…
physics.optics2023★ 2 cited
High-fidelity ptychographic imaging of highly periodic structures enabled by vortex high harmonic beams
Bin Wang, Nathan J. Brooks, Peter C. Johnsen +6
Ptychographic Coherent Diffractive Imaging enables diffraction-limited imaging of nanoscale structures at extreme ultraviolet and x-ray wavelengths, where high-quality image-formin…