11 citations · 22 across the 3 of their papers we have counts for
3 papers
Temperature-Dependent Dielectric Function of Tantalum Nitride Formed by Atomic Layer Deposition for Tunnel Barriers in Josephson Junctions
Ekta Bhatia, Aaron Lopez Gonzalez, Yoshitha Hettige +9
We report the dielectric functions of insulating tantalum nitride (TaN) films, deposited using atomic layer deposition (ALD) on 300 mm Si/SiO2 substrates, to demonstrate their suit…
Engineering of Niobium Surfaces Through Accelerated Neutral Atom Beam Technology For Quantum Applications
Soumen Kar, Conan Weiland, Chenyu Zhou +16
A major roadblock to scalable quantum computing is phase decoherence and energy relaxation caused by qubits interacting with defect-related two-level systems (TLS). Native oxides p…
Chemical Mechanical Planarization for Ta-based Superconducting Quantum Devices
Ekta Bhatia, Soumen Kar, Jakub Nalaskowski +9
We report on the development of a chemical mechanical planarization (CMP) process for thick damascene Ta structures with pattern feature sizes down to 100 nm. This CMP process is t…