most citedChemical Mechanical Planarization for Ta-based Superconducting Quantum Devices

11 citations · 11 across the 1 of their papers we have counts for

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1 paper

physics.app-ph2023★ 11 cited

Chemical Mechanical Planarization for Ta-based Superconducting Quantum Devices

Ekta Bhatia, Soumen Kar, Jakub Nalaskowski +9

We report on the development of a chemical mechanical planarization (CMP) process for thick damascene Ta structures with pattern feature sizes down to 100 nm. This CMP process is t…