3 papers
physics.plasm-ph2023
Experimental validation of particle-in-cell/Monte Carlo collisions simulations in low-pressure neon capacitively coupled plasmas
Chan-Won Park, Benedek Horváth, Aranka Derzsi +4
Plasma simulations are powerful tools for understanding fundamental plasma science phenomena and for process optimization in applications. To ensure their quantitative accuracy, th…
physics.plasm-ph2023
Frequency-dependent electron power absorption mode transitions in capacitively coupled argon-oxygen plasmas
Aranka Derzsi, Mate Vass, Ranna Masheyeva +3
Phase Resolved Optical Emission Spectroscopy (PROES) measurements combined with 1d3v Particle-in-Cell/Monte Carlo Collision (PIC/MCC) simulations are performed to investigate the e…
physics.plasm-ph2023
Nonlocal dynamics of secondary electrons in capacitively coupled radio frequency discharges
Katharina Noesges, Maximilian Klich, Aranka Derzsi +5
In capacitively coupled radio frequency (CCRF) discharges, the interaction of the plasma and the surface boundaries is linked to a variety of highly relevant phenomena for technolo…