20 citations · 46 across the 8 of their papers we have counts for
8 papers
Advancing SEM Based Nano-Scale Defect Analysis in Semiconductor Manufacturing for Advanced IC Nodes
Bappaditya Dey, Matthias Monden, Victor Blanco +2
In this research, we introduce a unified end-to-end Automated Defect Classification-Detection-Segmentation (ADCDS) framework for classifying, detecting, and segmenting multiple ins…
Benchmarking Feature Extractors for Reinforcement Learning-Based Semiconductor Defect Localization
Enrique Dehaerne, Bappaditya Dey, Sandip Halder +1
As semiconductor patterning dimensions shrink, more advanced Scanning Electron Microscopy (SEM) image-based defect inspection techniques are needed. Recently, many Machine Learning…
Automated Semiconductor Defect Inspection in Scanning Electron Microscope Images: a Systematic Review
Thibault Lechien, Enrique Dehaerne, Bappaditya Dey +4
A growing need exists for efficient and accurate methods for detecting defects in semiconductor materials and devices. These defects can have a detrimental impact on the efficiency…
SEMI-CenterNet: A Machine Learning Facilitated Approach for Semiconductor Defect Inspection
Vic De Ridder, Bappaditya Dey, Enrique Dehaerne +3
Continual shrinking of pattern dimensions in the semiconductor domain is making it increasingly difficult to inspect defects due to factors such as the presence of stochastic noise…
YOLOv8 for Defect Inspection of Hexagonal Directed Self-Assembly Patterns: A Data-Centric Approach
Enrique Dehaerne, Bappaditya Dey, Hossein Esfandiar +4
Shrinking pattern dimensions leads to an increased variety of defect types in semiconductor devices. This has spurred innovation in patterning approaches such as Directed self-asse…
Microwave Properties of Ba-Substituted Pb(ZrTi)O after Chemical-Mechanical Polishing
Federica Luciano, Lieve Teugels, Sean McMitchell +13
We have studied the effect of chemical-mechanical polishing (CMP) on the ferroelectric, piezoelectric, and microwave dielectric properties of Ba-substituted PZT (BPZT), deposited b…