most citedReactive pulsed direct current magnetron sputtering deposition of semiconducting yttrium oxide thin film in ultralow oxygen atmosphere: A spectroscopic and structural investigation of growth dynamics

7 citations · 7 across the 1 of their papers we have counts for

collaborators

1 paper

cond-mat.mtrl-sci2023★ 7 cited

Reactive pulsed direct current magnetron sputtering deposition of semiconducting yttrium oxide thin film in ultralow oxygen atmosphere: A spectroscopic and structural investigation of growth dynamics

H. Arslan, I. Aulika, A. Sarakovskis +5

An experimental investigation was conducted to explore spectroscopic and structural characterization of semiconducting yttrium oxide thin film deposited at 623 K (+/- 5K) utilizing…