most citedMaskless Generation of Single Silicon Vacancy Arrays in Silicon Carbide by a Focused He+ Ion Beam

19 citations · 19 across the 1 of their papers we have counts for

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1 paper

quant-ph2022★ 19 cited

Maskless Generation of Single Silicon Vacancy Arrays in Silicon Carbide by a Focused He+ Ion Beam

Zhen-Xuan He, Qiang Li, Xiao-Lei Wen +6

Precise generation of spin defects in solid-state systems is essential for nanostructure fluorescence enhancement. We investigated a method for creating single silicon vacancy defe…