collaborators

1 paper

physics.ins-det2022

Electron-beam lithography of nanostructures at the tips of scanning probe cantilevers

Luca Forrer, Aurèle Kamber, Armin Knoll +2

We developed a process to fabricate nanoscale metallic gate electrodes on scanning probe cantilevers, including on the irregular surface of protruding cantilever tips. The process…