15 citations · 16 across the 3 of their papers we have counts for
1 paper · 2 filters
Patrick Harvey-Collard, Abdelatif Jaouad, Dominique Drouin +1
Inductively Coupled Plasma (ICP) etching of amorphous silicon (a-Si) nanostructures using a continuous C4F8/SF6 plasma over nanotopography in silicon dioxide (SiO2) is investigated…