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physics.ins-det2024★ 3 cited
Characterisation of analogue MAPS fabricated in 65 nm technology for the ALICE ITS3
Kunal Gautam, Ajit Kumar
The ALICE ITS3 project foresees the use of ultra-light MAPS, developed in the 65 nm imaging process, for the vertex detector in the ALICE experiment at the LHC to drastically impro…
physics.ins-det2024
Characterisation of analogue Monolithic Active Pixel Sensor test structures implemented in a 65 nm CMOS imaging process
Gianluca Aglieri Rinella, Giacomo Alocco, Matias Antonelli +91
Analogue test structures were fabricated using the Tower Partners Semiconductor Co. CMOS 65 nm ISC process. The purpose was to characterise and qualify this process and to optimise…