1 citations · 2 across the 2 of their papers we have counts for
2 papers
physics.app-ph2022★ 1 cited
Deep multilevel wet etching of fused silica glass microstructures in BOE solution
T. G. Konstantinova, M. M. Andronic, D. A. Baklykov +8
Fused silica glass is a material of choice for micromechanical, microfluidic, and optical devices due to its ultimate chemical resistance, optical, electrical, and mechanical perfo…
physics.optics2022★ 1 cited
Low-loss silicon nitride photonic ICs for single-photon applications
Kirill A. Buzaverov, Aleksandr S. Baburin, Evgeny V. Sergeev +11
Low-loss photonic integrated circuits (PICs) are the key elements in future quantum technologies, nonlinear photonics and neural networks. The low-loss photonic circuits technology…