Monolithically integrated 940 nm half VCSELs on bulk Ge substrates

Yunlong Zhao, Jia Guo, Markus Feifel +7

High quality n-type AlGaAs distributed Bragg reflectors (DBRs) and lnGaAs multiple quantum wells were successfully monolithically grown on 4-inch off-cut Ge (100) wafers. The grown…