Designing low-cost TaC virtual substrates for $A{l}_{x}G{a}_{1-x}N$ epitaxy

Dennice M. Roberts, Andrew Norman, Moira K. Miller +1

$A{l}_{x}G{a}_{1-x}N$ is a critical ultra-wide bandgap material for optoelectronics, but the deposition of thick, high quality epitaxial layers has been hindered by a lack of lattice-mat…